Nanocrystalline Titanium Dioxide Dipped with AlCl2 as a Humidity Sensors

R B Butley

Department of Physics, Vidya Bharati Mahavidyalaya, Amravati(M.S.), India

R V Joat

Department of Physics, Vidya Bharati Mahavidyalaya, Amravati(M.S.), India

G T Lamdhade

Department of Physics, Vidya Bharati Mahavidyalaya, Amravati(M.S.), India

K B Raulkar

Department of Physics, Vidya Bharati Mahavidyalaya, Amravati(M.S.), India

A O Chauhan

Department of Physics, Vidya Bharati Mahavidyalaya, Amravati(M.S.), India

Vol: 13, Issue: 1, 2023

Receiving Date: 2022-12-31 Acceptance Date:


Publication Date:


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Titanium dioxide and AlCl2 was mixed in different stoichiometry in mol wt. % for the study. By using the screen printing technique, the thick films of humidity sensors are prepared. All of the humidity sensor devices are tested and finally concluded that the sample T-1 at constant temperature 400C to 700C exhibited high sensitivity and fast response time to humidity sensing at room temperature. In the case of conductivity, curves are frequently crowded and mixed together. The conductivity of Sample films linearly responds to Relative Humidity. The resistance of thick films decreases by increasing the humidity of sensors at room temperatures due to surface oxygen vacancies of TiO2 acting as electron donors.

Keywords: Thick films; TiO2-AlCl2; Sensitivity; Humidity sensors


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